In a first part we look at standard micro structuration techniques: Photolithography, wet etching, ion beam etching, dry etching.
In a second part, we treat more exploratory methods and methods for research: e-beam lithography, patterning and selective deposition, atom manipulation by micro probe techniques, self assembly approaches.
Finally we look also into so-called mesoscopic techniques, which are intermediate in length scales between classical machining and micromachining. Finally we shall also get some ideas about 3D printing techniques.
- Professor: Paul Muralt