Summary
The student will learn fundamentals, procedures and applications of specific microfabrication technologies, in particular techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on different materials and multidisciplinarity.
Content(1) Elements of mainstream Si technology, (2) Multilayer poly-Si micromachining, (3) Glass microfabrication, (4) Polymer microfabrication, (5) Bonding and gluing technologies, (6) Electroplating and the LIGA technique, (7) Biosensor technologies, (8) 3D printing or added manufacturing, (9) Microfluidic bioseparation techniques, (10) Magnetic labs-on-a chip.
Transversal skills
Concise oral presentation of a selected scientific article on a related topic (exercise sessions).
- Professor: Martinus Gijs
- Professor: Thomas Lehnert
