MICRO-428 Metrology

Lecturer(s) :

Bruschini Claudio
Charbon Edoardo
Fantner Georg
Vardi Ilan

Language:

English

Summary

The course deals with the concept of measuring in different domains, particularly in the electrical, optical, and microscale domains. The concept of precision, accuracy, and resolution will be introduced early in the course with an embedded course on statistics, which provide the basics required to understand how proper measurements ought to be performed. Subsequently, the course will introduce electrical, optical, and mechanical metrology techniques dealing with intrinsic and extrinsic limitations of the measurement. The course will end with a perspective on quantum measurements, which could trigger the ultimate revolution in metrology. Homework will be used as a means to practice the concepts learnt in class.

Syllabus

  • Classical metrology
  • Basic statistics
  • Electrical metrology
  • Optical microscopy
  • Optical imaging
  • Time 
  • AFM
  • SEM
  • Quantum metrology

Keywords

Accuracy, precision, resolution, reliability, fifdelity of the measurement

Learning Prerequisites

  • Required course: basic mathematics/physics
  • Recommended course: Design of experiments

Learning Outcomes

By the end of the course, the student should be able to:

  • Develeop measurement setups that yield reproducible results
  • Analyze the accuracy and precision of a measurement for a certain resolution
  • Interpret the quality of data from measurements

Assessment Methods
Self-assessment (ungraded homework, exercise session presence verified); final exam during exam sessions.


Resources

Notes / Handbook

Specialized labs, references TBD.

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