This class combines an analytical and finite elements modeling (FEM) simulations approach to scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.
- Professor: Anton Lagosh
- Professor: Niels Quack
- Professor: Philippe Renaud
- Professor: Herbert Shea
- Teacher: Dorian Giraud Herle
- Teacher: Hamed Sattari
- Teacher: Alain Yuji Takabayashi
