![](https://moodlearchive.epfl.ch/2023-2024/pluginfile.php/2294569/course/overviewfiles/Picture%201.jpg)
This class explores scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are analysed, across a broad range of actuation principles.
- Professor: Herbert Shea
This class explores scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are analysed, across a broad range of actuation principles.
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